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Scanning Force Microscopy on Laser Ablated Silicon Nitride Films

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Vrînceanu C., Flueraru C., Dinescu M., Vasile E.
Acta Physica Polonica A
|
1997
|
vol. 91
|
issue 5
1009-1014
EN
The following paper presents a study on laser-ablated silicon nitride films, obtained by the laser reactive ablation method. The aim of this paper is to investigate silicon nitride film surfaces, first by scanning electron microscopy and then, at a better resolution and a greater magnification, by the scanning (atomic) force microscopy technique.
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