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Micro- and Nanoprocessing of Polymers Using a Laser Plasma Extreme Ultraviolet Source

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Bartnik A., Fiedorowicz H., Jarocki R., Kostecki J., Rakowski R., Szczurek A., Szczurek M.
Acta Physica Polonica A
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2010
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vol. 117
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issue 2
384-390
EN
Laser plasma with temperature of the order of tens eV can be an efficient source of extreme ultraviolet (EUV). The radiation can be focused using different kind of optics, giving sufficient fluence for some applications. In this work we present results of investigations concerning applications of a laser plasma EUV source based on a double stream gas puff target. The source was equipped with two different grazing incidence collectors. One of them was a multifoil collector, the second one was an axisymmetrical ellipsoidal collector. The multifoil mirror was used mainly in experiments concerning micromachining of organic polymers by direct photo-etching. The experiments were performed for different polymers that were irradiated through a fine metal grid as a contact mask. The smallest element of a pattern structure obtained in this way was 5 μm, while the structure height was 50 μm giving an aspect ratio about 10. The laser-plasma EUV source equipped with the axisymmetrical ellipsoidal collector was used for surface modification of organic polymers and inorganic solids. The surface morphology after irradiation was investigated. Different forms of micro- and nanostructures were obtained depending on material and irradiation conditions.
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Creation of Nanostructures on Polymer Surfaces Irradiated with Extreme Ultraviolet Pulses

100%
Bartnik A., Fiedorowicz H., Jarocki R., Kostecki J., Szczurek A., Szczurek M.
Acta Physica Polonica A
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2009
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vol. 116
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issue S
S-108-S-110
EN
A laser-plasma extreme ultraviolet source equipped with grazing incidence and Mo/Si collectors was used for surface modification of selected polymers. Surface morphology after irradiation was investigated. Different forms of nanostructures were obtained depending on polymer and irradiation conditions.
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EUV-Induced Nanostructuring of Solids

100%
Bartnik A., Fiedorowicz H., Jarocki R., Kostecki J., Szczurek A., Szczurek M., Wachulak P.
Acta Physica Polonica A
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2012
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vol. 121
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issue 2
445-449
EN
In this work results of investigations concerning nanostructuring of polymers and some other solids using a laser-plasma extreme ultraviolet source are presented. The plasma radiation was produced using a gas puff target and focused with a gold-plated grazing incidence ellipsoidal collector. Decomposition process of polymers was investigated using a quadrupole mass spectrometer. Different kinds of micro- and nanostructures created in near-surface layers of the materials were investigated using scanning electron microscope. Forms of the structures depend on a particular material and the extreme ultraviolet exposure. In case of some polymers even a single shot is sufficient for creation of the visible changes in surface morphology. In case of inorganic solids visible changes require usually the exposure with tens or hundreds of extreme ultraviolet pulses.
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