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1992 | 81 | 1 | 145-157
Article title

Image Depth Profiling AES

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Languages of publication
EN
Abstracts
EN
Image depth profiling AES incorporating an image processing technique has been developed. This method reconstructs a cross-sectional image from acquired 2-dimensional and/or 3-dimensional data. A binary image produced from a secondary electron image through image processing can be used to cut the area of interest for selected area analysis. In a failure analysis of a relay contact, we found by cross-sectional image observation that Fe and Ni permeate from pin holes in an Au layer covering a Fe-Ni alloy. A VTR head made of a polycrystalline ferrite core covered with a Sendust (Si-Al-Fe alloy) layer at the gap has been analyzed. Depth distributions of Al, 0, and Fe on different grains, and Al and O distributions near grain boundaries have been successfully reassembled from the 3-dimensional data.
Keywords
EN
Year
Volume
81
Issue
1
Pages
145-157
Physical description
Dates
published
1992-01
received
1991-05-21
(unknown)
1991-08-10
References
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv81z115kz
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