PL EN


Preferences help
enabled [disable] Abstract
Number of results
2010 | 118 | 6 | 1148-1152
Article title

Analytical Model of Semiconductor Sensor Layers in SAW Gas Sensors

Content
Title variants
Languages of publication
EN
Abstracts
EN
In the paper a new theoretical model for analyzing a surface acoustic wave gas sensor is presented. Basing on the electric load of the piezoelectric acoustic line the effect of surface acoustic wave velocity changes vs. surface conductivity is predicted which depends on the profile concentration of gas molecules diffused into the porous film. Inside the sensor layer Knudsen's model of gas diffusion was used.
Keywords
EN
Contributors
author
  • ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland
author
  • Faculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
author
  • Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
References
  • 1. G. Sakai, N. Matsunaga, E. Shimanoe, N. Yamazone, Sensors Actuators B 80, 125 (2001)
  • 2. D.C. Malocha, B.H. Fischer, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 57, 163 (2010)
  • 3. D.C. Malocha, B.H. Fischer, in: School of Electrical Engineering & Computer Science, University of Central Florida, Orlando (USA) 2009, p. 32816
  • 4. T. Hejczyk, M. Urbańczyk, W. Jakubik, Acta Phys. Pol. A 118, 1153 (2010)
  • 5. B.A. Auld, Acoustic Fields and Waves, Vol. 2, Wiley, New York 1973
  • 6. J.W. Gardner, Sensors Actuators B 1, 166 (1990)
  • 7. T. Pisarkiewicz, Gas Microsensors, AGH, Kraków 2007 (in Polish)
  • 8. D.E. Williams, A. Hilger, Solid State Gas Sensors, Academic Press, Bristol 1987
  • 9. T. Pustelny, A. Opilski, B. Pustelny, Acta Phys. Pol. A 114, A-181 (2009)
  • 10. W. Jakubik, M. Urbańczyk, Arch. Acoust. 22, 187 (1997)
  • 11. W. Jakubik, Thin Solid Films 515, 8345 (2007)
  • 12. W. Jakubik, Sensors Actuat. B 96, 321 (2003)
  • 13. W. Jakubik, M. Urbańczyk, E. Maciak, T. Pustelny, Acta Phys. Pol. A 116, 315 (2009)
  • 14. B. Pustelny, T. Pustelny, Acta Phys. Pol. A 116, 383 (2009)
  • 15. W. Jakubik, M. Urbańczyk, J. Techn. Phys. 38, 589 (1997)
  • 16. G.S. Kino, IEEE Trans. Electron Dev. ED-18, 347 (1971)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv118n616kz
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.