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2010 | 118 | 6 | 1148-1152
Article title

Analytical Model of Semiconductor Sensor Layers in SAW Gas Sensors

Content
Title variants
Languages of publication
EN
Abstracts
EN
In the paper a new theoretical model for analyzing a surface acoustic wave gas sensor is presented. Basing on the electric load of the piezoelectric acoustic line the effect of surface acoustic wave velocity changes vs. surface conductivity is predicted which depends on the profile concentration of gas molecules diffused into the porous film. Inside the sensor layer Knudsen's model of gas diffusion was used.
Keywords
EN
Year
Volume
118
Issue
6
Pages
1148-1152
Physical description
Dates
published
2010-12
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv118n616kz
Identifiers
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