Analytical Model of Semiconductor Sensor Layers in SAW Gas Sensors

• Authors: T. Hejczyk , M. Urbańczyk , W. Jakubik
• Languages of publication: EN

Abstracts

EN

In the paper a new theoretical model for analyzing a surface acoustic wave gas sensor is presented. Basing on the electric load of the piezoelectric acoustic line the effect of surface acoustic wave velocity changes vs. surface conductivity is predicted which depends on the profile concentration of gas molecules diffused into the porous film. Inside the sensor layer Knudsen's model of gas diffusion was used.

Keywords

EN

77.65.Dq; 68.35.Iv; 07.07.Df

Discipline

• 77.65.Dq: Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics(see also 43.35.Pt Surface waves in solids and liquids—in Acoustics Appendix; for surface acoustic wave transducers, see 43.38.Rh—in Acoustics Appendix; for acousto-optical effects, see 78.20.hb, and 43.35.Sx—in Acoustics Appendix)
• 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• 68.35.Iv: Acoustical properties

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2010
• Volume: 118
• Issue: 6
• Pages: 1148-1152

Dates

published

2010-12

Contributors

author

T. Hejczyk

• ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland

author

M. Urbańczyk

• Faculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

author

W. Jakubik

• Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

References

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Identifiers

DOI

10.12693/APhysPolA.118.1148