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2009 | 116 | S | S-201-S-202
Article title

Scaling Fabrication Methods from Micro to Nano

Authors
Content
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Languages of publication
EN
Abstracts
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Publisher

Year
Volume
116
Issue
S
Pages
S-201-S-202
Physical description
Dates
published
2009-12
Contributors
author
  • Oxford Instruments Plasma Technology Ltd., UK
References
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv116ns59kz
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