Full-text resources of PSJD and other databases are now available in the new Library of Science.
Visit https://bibliotekanauki.pl

PL EN

Preferences help
Polish version English version Language
enabled [disable] Abstract
Number of results

Journal

Acta Physica Polonica A

2009 | 116 | S | S-201-S-202

Article title

Scaling Fabrication Methods from Micro to Nano

Authors

M. Cooke

Content

Full texts: http://przyrbwn.icm.edu.pl/APP/PDF/116/a116zs59.pdf [remote]

Title variants

Languages of publication

EN

Abstracts

Keywords

Publisher

Institute of Physics, Polish Academy of Sciences

Journal

Acta Physica Polonica A

Year

2009

Volume

116

Issue

S

Pages

S-201-S-202

Physical description

Dates

published
2009-12

Contributors

author
M. Cooke
  • Oxford Instruments Plasma Technology Ltd., UK

References

Document Type

Publication order reference

Identifiers

DOI
10.12693/APhysPolA.116.S-201

YADDA identifier

bwmeta1.element.bwnjournal-article-appv116ns59kz
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.