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2007 | 112 | 6 | 1271-1280
Article title

Atomic Layer Deposition of Magnetic Thin Films

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EN
Abstracts
EN
We report on the research effort towards the development of processes for the realization of magnetic tunnel junctions by atomic layer deposition. Our strategy follows two main schemes. The first is a hybrid process where the ferromagnetic layers are produced by chemical vapour deposition and the tunnel oxide is deposited by atomic layer deposition. As ferromagnetic electrodes we use Co and Fe_3O_4, while MgO, Al_2O_3, and HfO_2 are employed as tunnel oxides. The second and most intriguing scheme is a full-oxide approach in which the ferromagnetic layers and the tunnel barrier layer are all oxides grown by atomic layer deposition. As ferromagnetic layers we focused on the growth of complex manganites (La_{0.7 Sr_{0.3 MnO_3) while as a tunnel oxide we propose La_2O_3. Film composition has been studied with time of flight secondary ion mass spectroscopy and Rutherford backscattering spectrometry. X-ray diffraction, X-ray reflectivity, and Fourier transform infrared spectroscopy have been used to investigate the structure and morphology of the layers. The magnetic properties of the films are measured by superconducting quantum interference device magnetometer.
Keywords
EN
Contributors
author
  • Laboratorio Nazionale MDM CNR-INFM, via C. Olivetti 2, Agrate Brianza I-20041, Italy
author
  • Laboratorio Nazionale MDM CNR-INFM, via C. Olivetti 2, Agrate Brianza I-20041, Italy
author
  • Laboratorio Nazionale MDM CNR-INFM, via C. Olivetti 2, Agrate Brianza I-20041, Italy
author
  • Laboratorio Nazionale MDM CNR-INFM, via C. Olivetti 2, Agrate Brianza I-20041, Italy
author
  • Laboratorio Nazionale MDM CNR-INFM, via C. Olivetti 2, Agrate Brianza I-20041, Italy
author
  • Moscow Engineering Physics Institute, 115409 Moscow, Russia
author
  • Laboratorio Nazionale MDM CNR-INFM, via C. Olivetti 2, Agrate Brianza I-20041, Italy
author
  • Laboratorio Nazionale MDM CNR-INFM, via C. Olivetti 2, Agrate Brianza I-20041, Italy
References
  • 1. S.S.P. Parkin, C. Kaiser, A. Panchula, P.M. Rice, B. Hughes, M. Samat, S. Yang, Nature Mat., 862, 04 (20
  • 2. S Yuasa, T. Nagahama, A. Fukushima, Y. Suzuki, K. Ando, Nature Mat.)3 868, 04,
  • 3. M. Ritala, M. Leskelä, in: Handbook of Thin Film Materials (20 Vol. 1, Ed. H.S. Nalwa, Academic Press, New York 2002, p. 135)
  • 4. B.S. Lim, A. Rahtu, R.G. Gordon, Nature Mat., 2, 749 (2003), H. Kim, J. Vac. Sci. Technol. B, 21, 2231 (2003)
  • 5. P. Seneor, A. Fert, J.L. Maurice, F. Montaigne, F. Petroff, A. Vaurés, Appl. Phys. Lett., 74, 4017 (1999)
  • 6. E. Dagotto, T. Hotta, A. Moreo, Phys. Rep., 344, 01 (20
  • 7. Yu Lu, X.W. Li, G.O. Gong, Gang Xiao, A. Gupta, P. Lecoeur, J.Z. Sun, Y.Y. Wang, V.P. Dravid, Phys. Rev. B, 54, R8357 (1996))
  • 8. J.M. Coey, M. Viret, S. von Molnar, Adv. Phys., 48, 167 (1999)
  • 9. A.M. Haghiri-Gosnet, J.P. Renard, J. Phys. D, Appl. Phys., 36, R127 (2003)
  • 10. O. Nilsen, M. Lie, H. Fjellvag, A. Kjekshus, in: Rare Earth Oxide Thin Film: Growth, Characterization, and Applications , Eds. M. Fanciulli, G. Scarel, Springer Verlag, Heidelberg 2007
  • 11. M.E. Gross, K. Schnoes Kranz, D. Brasen, H. Luftman, J. Vac. Sci. Technol. B, 6, 1548 (1988)
  • 12. L. Zhou, P.E. Wigen, IEEE Trans. Magn., 29, 3052 (1993)
  • 13. C. Dallera, F. Fracassi, L. Braicovich, G. Scarel, C. Wiemer, M. Fanciulli, G. Pavia, B.C.C. Cowie, Appl. Phys. Lett., 89, 183521 (2006)
  • 14. S.D. Elliott, G. Scarel, C. Wiemer, M. Fanciulli, G. Pavia, Chem. Mater., 18, 3764 (2006)
  • 15. G. Scarel, S. Spiga, C. Wiemer, G. Tallarida, S. Ferrari, M. Fanciulli, Mater. Sci. Engineer. B, 109, 11 (2004)
  • 16. M. Putkonen, T. Sajavaara, L. NiinistÖ, J. Mater. Chem., 10, 1857 (2000)
  • 17. J.R. Jasperse, A. Kahan, J.N. Plendl, Phys. Rev., 146, 526 (1966)
  • 18. C. Kwon, M.C. Robson, K.-C. Kim, J.Y. Gu, S.E. Lofland, S.M. Bhagat, Z. Trajanovic, M. Rajeswari, T. Venkatesan, A.R. Kratz, R.D. Gomez, R. Ramesh, J. Magn. Magn. Mater, 172, 229 (1997)
  • 19. M. Nieminen, M. Putkonen, L. NiinistÖ, Appl. Surf. Sci., 174, 155 (2001)
  • 20. G. Scarel, A. Debernardi, D. Tsoutsou, S. Spiga, S.C. Capelli, L. Lamagna, S.N. Volkos, M. Alia, M. Fanciulli, unpublished
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv112n613kz
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