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Journal
2012 | 10 | 4 | 888-897
Article title

Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas

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EN
Abstracts
EN
The effect of gas flow in low pressure inductively coupled Ar/N2 plasmas operating at the rf frequency of 13.56 MHz and the total gas pressure of 20 mTorr is studied at the gas flows of 5–700 sccm by coupling the plasma simulation with the calculation of flow dynamics. The gas temperature is 300 K and input power is 300 W. The Ar fractions are varied from 0% to 95%. The species taken into account include electrons, Ar atoms and their excited levels, N2 molecules and their seven different excited levels, N atoms, and Ar+, N+, N2
+, N4
+ ions. 51 chemical reactions are considered. It is found that the electron densities increase and electron temperatures decrease with a rise in gas flow rate for the different Ar fractions. The densities of all the plasma species for the different Ar fractions and gas flow rates are obtained. The collisional power losses in plasma discharges are presented and the effect of gas flow is investigated.
Publisher
Journal
Year
Volume
10
Issue
4
Pages
888-897
Physical description
Dates
published
1 - 8 - 2012
online
17 - 7 - 2012
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.-psjd-doi-10_2478_s11534-012-0034-y
Identifiers
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