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Journal
2011 | 9 | 5 | 1351-1356
Article title

Hydrogen gas sensors based on nanocrystalline TiO2 thin films

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EN
Abstracts
EN
Titanium dioxide thin films are extensively studied for applications in solid state gas sensor devices. Their gas sensing properties are strongly dependent on deposition technique, annealing temperature, film thickness and consequent properties like crystalline structure, grain size or amount of defects and impurities. In this work we report the gas sensing properties of TiO2 thin films prepared by reactive magnetron sputtering technique and subsequently annealed at temperatures 600°C and 900°C. The films were exposed to different concentrations of H2 gas up to 10 000 ppm. Their sensitivity to gas at various operating temperatures, ranging from 250°C to 450°C, was obtained by measuring their resistance.
Keywords
Publisher
Journal
Year
Volume
9
Issue
5
Pages
1351-1356
Physical description
Dates
published
1 - 10 - 2011
online
15 - 9 - 2011
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.-psjd-doi-10_2478_s11534-011-0042-3
Identifiers
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