Hydrogen gas sensors based on nanocrystalline TiO2 thin films

• Authors: Azhar Haidry , Peter Schlosser , Pavol Durina , Marian Mikula , Milan Tomasek , Tomas Plecenik , Tomaš Roch , Andrej Pidik , Miloslav Stefecka , Jaroslav Noskovic , Miroslav Zahoran , Peter Kus , Andrej Plecenik
• Languages of publication: EN

Abstracts

EN

Titanium dioxide thin films are extensively studied for applications in solid state gas sensor devices. Their gas sensing properties are strongly dependent on deposition technique, annealing temperature, film thickness and consequent properties like crystalline structure, grain size or amount of defects and impurities. In this work we report the gas sensing properties of TiO2 thin films prepared by reactive magnetron sputtering technique and subsequently annealed at temperatures 600°C and 900°C. The films were exposed to different concentrations of H2 gas up to 10 000 ppm. Their sensitivity to gas at various operating temperatures, ranging from 250°C to 450°C, was obtained by measuring their resistance.

Keywords

EN

gas sensor; TiO2; nanocrystalline; thin film; hydrogen

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2011
• Volume: 9
• Issue: 5
• Pages: 1351-1356

Dates

published

1 - 10 - 2011

online

15 - 9 - 2011

Contributors

author

Azhar Haidry

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

author

Peter Schlosser

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

author

Pavol Durina

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

author

Marian Mikula

author

Milan Tomasek

author

Tomas Plecenik

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

author

Tomaš Roch

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

author

Andrej Pidik

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

author

Miloslav Stefecka

author

Jaroslav Noskovic

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

author

Miroslav Zahoran

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

author

Peter Kus

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

author

Andrej Plecenik

• Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Bratislava, Czechoslovakia

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Identifiers

DOI

10.2478/s11534-011-0042-3