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Journal
2011 | 9 | 5 | 1344-1350
Article title

Modification of the amorphous carbon films by the ns-laser irradiation

Content
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EN
Abstracts
EN
The effect of a nanosecond laser irradiation of thin (60 and 145 nm) amorphous, diamond-like carbon films deposited on Si substrate by an ion beam deposition (IBD) from pure acetylene and acetylene/hydrogen (1:2) gas mixture was analyzed in this work. The films were irradiated with the infrared (IR) and ultraviolet (UV) radiation of the nanosecond Nd:YAG lasers working at the first (1.16 eV) and the third (3.48 eV) harmonics, using a multi-shot regime. The IR laser irradiation stimulated a minor increase in the fraction of sp2 bonds, causing a slight decrease in the hardness of the films and initiated SiC formation. Irradiation with the UV laser caused the formation of carbides and increased hydrogenization of the Si substrate and the fraction of sp2 sites. Spalliation and ablation were observed at a higher energy density and with a large number of laser pulses per spot.
Publisher

Journal
Year
Volume
9
Issue
5
Pages
1344-1350
Physical description
Dates
published
1 - 10 - 2011
online
15 - 9 - 2011
Contributors
  • Physics department, Kaunas University of Technology, Studentu st. 50, LT-51368, Kaunas, Lithuania
  • Physics department, Kaunas University of Technology, Studentu st. 50, LT-51368, Kaunas, Lithuania
  • Center for Physical Sciences and Technology, Savanoriu Ave. 231, LT-02300, Vilnius, Lithuania
References
  • [1] K.P. Chu, L. Li, Mater. Chem. Phys. 96, 253 (2006) http://dx.doi.org/10.1016/j.matchemphys.2005.07.048[Crossref]
  • [2] J. Robertson, Mater. Sci. Eng. R37, 129 (2002)
  • [3] M.G. Beghi et al., Appl. Phys. Lett. 81, 3804 (2002) http://dx.doi.org/10.1063/1.1510179[Crossref]
  • [4] T.V. Kononenko et al., Appl. Surf. Sci. 86, 234 (1995) http://dx.doi.org/10.1016/0169-4332(94)00417-X[Crossref]
  • [5] T.V. Kononenko et al., Diam. Relat. Mater. 14, 1368 (2005) http://dx.doi.org/10.1016/j.diamond.2005.02.009[Crossref]
  • [6] S.K. Sundaram, E. Mazur, Nat. Mater. 1, 217 (2002) http://dx.doi.org/10.1038/nmat767[Crossref]
  • [7] R. Le Harzic et al., Appl. Phys. Lett. 80, 3886 (2002) http://dx.doi.org/10.1063/1.1481195[Crossref]
  • [8] G. Daminelli, S. Pentzien, A. Hertwig, J. Kruger, Appl. Phys. A-Mater. 83, 89 (2006) http://dx.doi.org/10.1007/s00339-005-3460-5[Crossref]
  • [9] E. Cappelli, C. Scilletta, S. Orlando, V. Valentini, M. Servidori, Appl. Surf. Sci. 255, 5620 (2009) http://dx.doi.org/10.1016/j.apsusc.2008.10.062[Crossref]
  • [10] L.H. Zang, J.P. Wang, H. Gong, J. Phys.-Condens. Mat. 13, 2989 (2001) http://dx.doi.org/10.1088/0953-8984/13/13/312[Crossref]
  • [11] A. Grigonis, Z. Rutkunienė, A. Medvids, Vacuum 82, 1212 (2008) http://dx.doi.org/10.1016/j.vacuum.2008.02.001[Crossref]
  • [12] C. Malagu, V. Guidi, M.C. Carotta, G. Martinelli, Appl. Phys. Lett. 84, 4158 (2004) http://dx.doi.org/10.1063/1.1755419[Crossref]
  • [13] D. Vouagner, C. Beleznai, J.P. Girardeau-Montaut, C. Templier, H. Gonnord, Appl. Surf. Sci. 201, 154 (2000)
  • [14] A. Grigonis, A. Medvid, P. Onufrijevs, J. Babonas, A. Rėza, Opt. Mater. 30, 749 (2008) http://dx.doi.org/10.1016/j.optmat.2007.02.027[Crossref]
  • [15] M. Silinskas, A. Grigonis, V. Kulikauskas, I. Manika, Thin Solid Films 516, 1683 (2008) http://dx.doi.org/10.1016/j.tsf.2007.05.015[Crossref]
  • [16] M. Silinskas, A. Grigonis, Diam. Relat. Mater. 11, 1026 (2002) http://dx.doi.org/10.1016/S0925-9635(01)00734-8[Crossref]
  • [17] W. Wei, Vacuum 81, 857 (2007) http://dx.doi.org/10.1016/j.vacuum.2006.10.005[Crossref]
  • [18] J. Keczkowska, Cent. Eur. J. Phys. DOI: 10.2478/s11534-010-0090-0 [Crossref]
  • [19] L. Marcinauskas, A. Grigonis, V. Valinčius, J. Non-Cryst. Solids 355, 1240 (2009) http://dx.doi.org/10.1016/j.jnoncrysol.2009.05.009[Crossref]
  • [20] J. Ristein, R.T. Stief, L Ley, W. Beyer, J. Appl. Phys. 84, 3836 (1998) http://dx.doi.org/10.1063/1.368563[Crossref]
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.-psjd-doi-10_2478_s11534-011-0037-0
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