Modification of the amorphous carbon films by the ns-laser irradiation

• Authors: Alfonsas Grigonis , Liutauras Marcinauskas , Vinga Vinciunaite , Gediminas Raciukaitis
• Languages of publication: EN

Abstracts

EN

The effect of a nanosecond laser irradiation of thin (60 and 145 nm) amorphous, diamond-like carbon films deposited on Si substrate by an ion beam deposition (IBD) from pure acetylene and acetylene/hydrogen (1:2) gas mixture was analyzed in this work. The films were irradiated with the infrared (IR) and ultraviolet (UV) radiation of the nanosecond Nd:YAG lasers working at the first (1.16 eV) and the third (3.48 eV) harmonics, using a multi-shot regime. The IR laser irradiation stimulated a minor increase in the fraction of sp2 bonds, causing a slight decrease in the hardness of the films and initiated SiC formation. Irradiation with the UV laser caused the formation of carbides and increased hydrogenization of the Si substrate and the fraction of sp2 sites. Spalliation and ablation were observed at a higher energy density and with a large number of laser pulses per spot.

Keywords

EN

diamond-like carbon; laser irradiation; graphitization; spallation

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2011
• Volume: 9
• Issue: 5
• Pages: 1344-1350

Dates

published

1 - 10 - 2011

online

15 - 9 - 2011

Contributors

author

Alfonsas Grigonis

• Physics department, Kaunas University of Technology, Studentu st. 50, LT-51368, Kaunas, Lithuania

author

Liutauras Marcinauskas

author

Vinga Vinciunaite

• Physics department, Kaunas University of Technology, Studentu st. 50, LT-51368, Kaunas, Lithuania

author

Gediminas Raciukaitis

• Center for Physical Sciences and Technology, Savanoriu Ave. 231, LT-02300, Vilnius, Lithuania

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Identifiers

DOI

10.2478/s11534-011-0037-0