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2014 | 1 | 1 |

Article title

Extension of solid immersion lens technology to
super-resolution Raman microscopy


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Scanning Near-Field Optical Microscopy
(SNOM) has developed during recent decades into a
valuable tool to optically image the surface topology of
materials with super-resolution. With aperture-based
SNOM systems, the resolution scales with the size of the
aperture, but also limits the sensitivity of the detection
and thus the application for spectroscopic techniques
like Raman SNOM. In this paper we report the extension
of solid immersion lens (SIL) technology to Raman SNOM.
The hemispherical SIL with a tip on the bottom acts as
an apertureless dielectric nanoprobe for simultaneously
acquiring topographic and spectroscopic information.
The SIL is placed between the sample and the microscope
objective of a confocal Raman microscope. The lateral
resolution in the Raman mode is validated with a
cross section of a semiconductor layer system and, at
approximately 180 nm, is beyond the classical diffraction
limit of Abbe.







Physical description


22 - 11 - 2014
22 - 6 - 2014
8 - 10 - 2014


  • Process Analysis
    & Technology, Reutlingen Research Institute, Reutlingen University,
    Alteburgstr. 150, D-72762 Reutlingen
  • Process Analysis
    & Technology, Reutlingen Research Institute, Reutlingen University,
    Alteburgstr. 150, D-72762 Reutlingen
  • Process Analysis
    & Technology, Reutlingen Research Institute, Reutlingen University,
    Alteburgstr. 150, D-72762 Reutlingen
  • Process Analysis
    & Technology, Reutlingen Research Institute, Reutlingen University,
    Alteburgstr. 150, D-72762 Reutlingen
  • Institute for Physical and Theoretical Chemistry,
    Auf der Morgenstelle 18, University of Tübingen, D-72076 Tübingen


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