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Number of results
2021 | 28 | 4 |

Article title

Metrology and control of electromagnetically actuated cantilevers using optical beam deflection method

Content

Title variants

PL
Metrology and control of electromagnetically actuated cantilevers using optical beam deflection method

Languages of publication

EN

Abstracts

Year

Volume

28

Issue

4

Physical description

References

Document Type

Publication order reference

Identifiers

YADDA identifier

bwmeta1.element.oai-journals-pan-pl-121797
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