MOCVD of Perovskites with Metallic Conductivity

• Authors: O. Gorbenko , A. Kaul , A. Molodyk , M. Novozhilov , A. Bosak , N. Babushkina , L. Belova , U. Krause , G. Wahl
• Languages of publication: EN

Abstracts

EN

Single source MOCVD techniques were used to prepare perovskite films with metallic conductivity (CaRuO_{3}, LaNiO_{3}, La_{0.5}Sr_{0.5}CoO_{3} and (La,Pr)_{0.7}(Sr,Ca)_{0.3}MnO_{3}). Structural and electrical properties of the epitaxial layers on the coherent substrates are close to that of the films grown by pulsed laser deposition and magnetron sputtering. Peculiarities of the growth occur on the worse matched substrates, such as a mixture of two orientations, each aligned in the plane of the interface (LaNiO_{3}/MgO) and variant structures in the films on yttrium stabilized zirconia. X-ray diffraction of the films indicates pseudocubic lattice for all R_{1-x}A_{x}MO_{3} films in spite of the distortions in the bulk material. The dependence of metal-insulator transition in R_{1-x}A_{x}MnO_{3} on the nature of R and A and film-substrate lattice mismatch was studied.

Keywords

EN

81.15.Gh; 68.55.-a

Discipline

• 81.15.Gh: Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)(for chemistry of MOCVD, see 82.33.Ya in physical chemistry and chemical physics)
• 68.55.-a: Thin film structure and morphology(for methods of thin film deposition, film growth and epitaxy, see 81.15.-z)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 1997
• Volume: 92
• Issue: 1
• Pages: 237-242

Dates

published

1997-07

Contributors

author

O. Gorbenko

• Chemistry Department, Moscow State University, 119899 Moscow, Russia

author

A. Kaul

• Chemistry Department, Moscow State University, 119899 Moscow, Russia

author

A. Molodyk

• Chemistry Department, Moscow State University, 119899 Moscow, Russia

author

M. Novozhilov

• Chemistry Department, Moscow State University, 119899 Moscow, Russia

author

A. Bosak

• Chemistry Department, Moscow State University, 119899 Moscow, Russia

author

N. Babushkina

• Kurchatov Institute, 123182 Moscow, Russia

author

L. Belova

• Kurchatov Institute, 123182 Moscow, Russia

author

U. Krause

• IOPW, TU Braunschweig, Bienroder Weg 53, 38108 Braunschweig, Germany

author

G. Wahl

• IOPW, TU Braunschweig, Bienroder Weg 53, 38108 Braunschweig, Germany

Identifiers

DOI

10.12693/APhysPolA.92.237