EN
The model of quantitative interpretation of Auger electron spectroscopy (AES) results is described and some complementary electron energy loss spectroscopy (EELS) results are also reported. It is shown that the InP(100) surfaces perturbed by the Ar^{+} cleaning treatment can be ordered by Sb deposition. The variations of different Auger lines are interpreted, and the transformations 3D → 2D of the initially formed In clusters can be well-followed during the first stages of the deposition.