Design, Modeling and Simulation of MEMS Devices on Si, SiC, and Diamond for Harsh Environment Applications

• Authors: A. Kociubiński , T. Bieniek , G. Janczyk
• Languages of publication: EN

Abstracts

EN

Set of micromechanical (MEMS) test structures designed for fabrication on silicon, silicon carbide and diamond substrates has been successfully designed. A dedicated mask-set development has been carried along with numerical simulations performed with assistance of a dedicated design and modelling CoventorWare™ - toolset by Coventor. A set of sample simulations presented in this paper has been performed for specific simulation domains focused on silicon-alternative material reality to proof the usefulness of proposed substrates. The aim was to verify its applicability for MEMS design and confirm an outstanding performance of the resulting device which effectively opens a new area of interest for subsequent research and development efforts.

Keywords

EN

07.05.Tp; 07.07.Df; 62.20.-x; 62.25.Fg

Discipline

• 62.20.-x: Mechanical properties of solids
• 62.25.Fg: High-frequency properties, responses to resonant or transient (time-dependent) fields
• 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• 07.05.Tp: Computer modeling and simulation

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2014
• Volume: 125
• Issue: 6
• Pages: 1374-1376

Dates

published

2014-06

Contributors

author

A. Kociubiński

• Lublin University of Technology, Nadbystrzycka 38a, 20-618 Lublin, Poland

author

T. Bieniek

• Institute of Electron Technology, al. Lotników 32/46, 02-668 Warszawa, Poland

author

G. Janczyk

• Institute of Electron Technology, al. Lotników 32/46, 02-668 Warszawa, Poland

References

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Identifiers

DOI

10.12693/APhysPolA.125.1374