Numerical Optimization of Structures SAW Gas Sensors

• Authors: T. Hejczyk , M. Urbańczyk
• Languages of publication: EN

Abstracts

EN

This paper presents the results of the analysis of surface acoustic waves sensor equivalent model. They were the sensor response of the surface acoustic waves sensor in the steady state gas: H_2, CO_2, NO_2, NH_3, C_nH_m, CO. Thin layer of WO_3 has been used as a sensor layer. Impedance replacement of sensor layer, taking into account the profile of the concentration of gas molecules in the layer, has been implemented into the equation of Ingebrigtsen, which enabled us to obtain analytical expressions for the relative changes in surface wave velocity in the steady state. The results of the analysis show that there is an optimum thickness of layer sensor for which an acoustoelectric effect (change in the acoustic wave velocity) is the highest.

Keywords

EN

43.25.Fe; 77.65.Dq; 68.35.Iv; 07.07.Df

Discipline

• 77.65.Dq: Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics(see also 43.35.Pt Surface waves in solids and liquids—in Acoustics Appendix; for surface acoustic wave transducers, see 43.38.Rh—in Acoustics Appendix; for acousto-optical effects, see 78.20.hb, and 43.35.Sx—in Acoustics Appendix)
• 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• 68.35.Iv: Acoustical properties

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 124
• Issue: 3
• Pages: 432-435

Dates

published

2013-09

Contributors

author

T. Hejczyk

• ENTE Sp. z o.o., A. Gaudiego 1, 44-100 Gliwice, Poland

author

M. Urbańczyk

• Faculty of Electrical Engineering, Silesian University of Technology, B. Krzywoustego 2, 44-100 Gliwice, Poland

References

• [1] K. Jasek, S. Neffe, M. Pasternak, Acta Phys. Pol. A 122, 825 (2012)
• [2] T. Pustelny, A. Opilski, B. Pustelny, Acta Phys. Pol. A 114, A-183 (2008)
• [3] A. Kawalec, M. Pasternak, K. Jasek, Eur. Phys. J. Spec. Top. 154, 123 (2008)
• [4] M. Urbańczyk, Sensors with Surface Acoustic Wave - Monograph, Vol. 213, SUT, Gliwice 2011 (in Polish)
• [5] T. Pustelny, J. Ignac-Nowicka, Z. Opilski, Opt. Appl. 34, 563 (2004)
• [6] K. Jasek, W. Miluski, M. Pasternak, Acta Phys. Pol. A 120, 638 (2011)
• [7] P. Struk, T. Pustelny, K. Gut, K. Golaszewska, E. Kaminska, M. Ekielski, I. Pasternak, E. Lusakowska, A. Piotrowska, Acta Phys. Pol. A 116, 414 (2009)
• [8] T. Pustelny, J. Ignac-Nowicka, Z. Opilski, Opt. Appl. 34, 249 (2004)
• [9] T. Pustelny, M. Grabka, Acta Phys. Pol. A 116, 385 (2009)
• [10] B. Pustelny, T. Pustelny, Acta Phys. Pol. A 116, 383 (2009)
• [11] F. Byron, R. Fuller, Mathematics in Classical and Quantum Physics, Vol. I, PWN, Warsaw 1973 (in Polish)
• [12] T. Hejczyk, M. Urbańczyk, Acta Phys. Pol. A 120, 798 (2011)
• [13] T. Hejczyk, M. Urbańczyk, R. Witula, E. Maciak, Bull. Pol. Acad. Sci., Techn. Sci. 60, 589 (2012)
• [14] T. Hejczyk, M. Urbańczyk, W.P. Jakubik, Acta Phys. Pol. A 118, 1158 (2010)
• [15] W. Jakubik, M. Urbańczyk, E. Maciak, T. Pustelny, Bull. Pol. Acad. Sci., Techn. Sci. 56, 133 (2008)
• [16] T. Hejczyk, M. Urbańczyk, Acta Phys. Pol. A 120, 616 (2011)

Identifiers

DOI

10.12693/APhysPolA.124.432