Influence of Ca Content on the Structure and Properties οf (Co,Ca)O Thin Films Deposited by PLD Technique

• Authors: L. Cieniek , S. Kac
• Languages of publication: EN

Abstracts

EN

In this paper the results of investigations of pure and Ca-doped CoO thin films deposited by PLD technique are presented. The studies carried out for variable Ca content allowed to establish optimal conditions for good quality oxide films preparation. The microstructure, chemical/phase composition and morphology of obtained thin films were examined by means of diverse techniques (SEM, EDS, XPS and XRD). For estimation of deposited Ca-doped CoO films quality the nanohardness and scratch tests (adhesion) were performed. Obtained results confirm that using PLD technique it is possible to carry stoichiometric composition of (Co,Ca)O from target to single crystal substrate and allow to conclude that the calcium dopant concentration (chemical composition) influence on the morphology and measured properties of deposited (Co,Ca)O films.

Keywords

EN

81.15.Fg; 81.15.-z; 81.15.Aa; 68.55.-a; 68.60.Bs; 68.37.-d; 68.55.jd

Discipline

• 81.15.Aa: Theory and models of film growth
• 68.55.jd: Thickness
• 68.60.Bs: Mechanical and acoustical properties
• 68.37.-d: Microscopy of surfaces, interfaces, and thin films
• 81.15.Fg: Pulsed laser ablation deposition
• 81.15.-z: Methods of deposition of films and coatings; film growth and epitaxy(for structure of thin films, see 68.55.-a; see also 85.40.Sz Deposition technology in microelectronics; for epitaxial dielectric films, see 77.55.Px)
• 68.55.-a: Thin film structure and morphology(for methods of thin film deposition, film growth and epitaxy, see 81.15.-z)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2010
• Volume: 117
• Issue: 5
• Pages: 803-807

Dates

published

2010-05

Contributors

author

L. Cieniek

• Faculty of Metals Engineering and Industrial Computer Science, AGH University of Science and Technology, 30 Mickiewicza Ave., 30-059 Cracow, Poland

author

S. Kac

• Faculty of Metals Engineering and Industrial Computer Science, AGH University of Science and Technology, 30 Mickiewicza Ave., 30-059 Cracow, Poland

References

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Identifiers

DOI

10.12693/APhysPolA.117.803