EN
Electrical characteristics of the heterojunction fabricated by thermal deposition of copper phthalocyanine (CuPc) on an n-silicon substrate have been investigated. The frequency has significant effect on capacitance (C), conductance (G) and series resistance (R_{s}) interface states (D_{it}) of the junction. Measured capacitance and conductance were corrected for R_{s}. The conductance technique was used to measure the density of the interface states. This method revealed the value of the interface state density distribution for the Au/n-Si/CuPc/Au interfaces of the order of 10^{12} cm^{-2} eV^{-1}.