Characteristics of Carbon Films Deposited by Magnetron Sputtering

• Authors: W. Mróz , S. Burdyńska , A. Prokopiuk , M. Jedyński , B. Budner , M. Korwin-Pawlowski
• Languages of publication: EN

Abstracts

EN

Carbon thin films are often called in the literature, "diamond-like carbon" films. They consist of two basic allotropic forms of carbon, which are graphite and diamond. Carbon atoms with sp^{2} bonds form after deposition of a graphite-like phase. Atoms with sp^{3} bonds form a diamond-like phase. Diamond-like crystallites are built into a graphite-like phase matrix. In this paper there are presented experimental results of deposition of carbon films by the magnetron sputtering method and the results of analysis of the surface and phase structures of the deposited films. The amorphous carbon films were deposited from graphite targets on 316L steel substrates. The films were deposited at room temperature, in vacuum. The deposition time was 3 h; the depositions were conducted at two different distances between the substrate and the magnetron target.

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2009
• Volume: 116
• Issue: S
• Pages: S-120-S-122

Dates

published

2009-12

Contributors

author

W. Mróz

• Military University of Technology, Institute of Optoelectronics, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

S. Burdyńska

• Military University of Technology, Institute of Optoelectronics, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

A. Prokopiuk

• Military University of Technology, Institute of Optoelectronics, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

M. Jedyński

• Military University of Technology, Institute of Optoelectronics, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

B. Budner

• Military University of Technology, Institute of Optoelectronics, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

M. Korwin-Pawlowski

• Université du Québec en Outaouais, Département d'informatique et d'ingénierie, 101, rue Saint-Jean-Bosco, Gatineau, Québec J8X 3X7, Canada

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Identifiers

DOI

10.12693/APhysPolA.116.S-120