Variable-Energy Positron Annihilation as Highly Sensitive Nanoporosimetry for Porous Thin Films

• Authors: K. Ito , Y. Kobayashi
• Languages of publication: EN

Abstracts

EN

Positron annihilation was applied to measuring critical pore sizes in various materials. In recent years, positron annihilation with a variable-energy positron beam has emerged as a powerful tool for the investigation of porous thin films synthesized as low-k dielectrics, high performance gas sensor materials, and so on. This paper is a brief overview of recent progress in nanopore characterization of thin films by means of positron annihilation with a description of several important issues relevant to positron annihilation.

Keywords

EN

78.70.Bj; 78.55.Mb

Discipline

• 78.70.Bj: Positron annihilation(for positron states, see 71.60.+z in electronic structure of bulk materials; for positronium chemistry, see 82.30.Gg in physical chemistry and chemical physics)
• 78.55.Mb: Porous materials

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2005
• Volume: 107
• Issue: 5
• Pages: 717-723

Dates

published

2005-05

received

2004-09-20

Contributors

author

K. Ito

• National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST), Tsukuba, Ibaraki 305-8565, Japan

author

Y. Kobayashi

• National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST), Tsukuba, Ibaraki 305-8565, Japan

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Identifiers

DOI

10.12693/APhysPolA.107.717