Electron Microscopy and X-ray Diffraction Study of AlN Layers

• Authors: A. Kowalczyk , A. Jagoda , A. Mücklich , W. Matz , M. Pawłowska , R. Ratajczak , A. Turos
• Languages of publication: EN

Abstracts

EN

AlN nanocrystalline layers and superstructures are used in the modern optoelectronic technology as reflecting mirrors in semiconductor lasers. In the present work the properties of AlN films prepared by sputtering methods from an AlN target in reactive Ar + N plasma were investigated. The characterisation was performed with HRTEM, SEM, glancing angle XRD and RBS methods. The present measurements confirmed the polycrystalline structure of AlN layers and enabled the evaluation of their grain size. The roughness and thickness of the layers were additionally determined by ellipsometric and profilometric measurements.

Keywords

EN

52.77.Dq

Discipline

• 52.77.Dq: Plasma-based ion implantation and deposition(see also 81.15.Jj Ion and electron beam-assisted deposition)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2002
• Volume: 102
• Issue: 2
• Pages: 221-225

Dates

published

2002-08

received

2001-09-23

Contributors

author

A. Kowalczyk

• Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland

author

A. Jagoda

• Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland

author

A. Mücklich

• Forschungszentrum Rossendorf, IIM, POB 510119, 01314 Dresden, Germany

author

W. Matz

• Forschungszentrum Rossendorf, IIM, POB 510119, 01314 Dresden, Germany

author

M. Pawłowska

• Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland

author

R. Ratajczak

• Soltan Institute for Nuclear Studies, Hoża 69, 00-681 Warsaw, Poland

author

A. Turos

• Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland

References

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• 6. A. Jagoda, L. Dobrzański, K. Dąbrowska, K. Przyborowska, in: VII Konferencja Naukowa 'Technologia Elektronowa', ELTE 2000, Polanica Zdrój (Poland) 2000, p. 717 (in Polish)
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Identifiers

DOI

10.12693/APhysPolA.102.221