Study of diamond film nucleation by ultrasonic seeding in different solutions

• Authors: Marián Varga , Tibor Ižák , Alexander Kromka , Marian Veselý , Karel Hruška , Miroslav Michalka
• Languages of publication: EN

Abstracts

EN

In this study we have investigated diamond nucleation on Si substrates by ultrasonic seeding with different liquid solutions of Ultradispersed Detonation Diamond (UDD) powder in a mixture of metal nano- or microparticles (Ni, Co, Y). The influence of different solutions on nucleation efficiency was investigated. For highlighting nucleation centers and better evaluation of the nucleation process the nucleated samples were moved into a Microwave Plasma Enhanced Chemical Vapor Deposition (MW CVD) reactor and a ”short-time” (10 min), then followed by a ”long-time” (+1 hour), diamond deposition was performed. The morphology of samples was characterized by Scanning Electron Microscopy (SEM) and the chemical composition of grown diamond layer was investigated by Raman Spectroscopy. From the measurements we found out that microsized metal particles positively influenced nucleation and the uniformity of the deposited diamond thin film. The lowest surface roughness was achieved in the case of nanodiamond powder mixed with Co and Y metal powder. The influence of Ni, Co and Y to the nucleation and early growth stage are discussed.

Keywords

EN

diamond; nucleation; ultrasonic abrasion; SEM; Raman

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2012
• Volume: 10
• Issue: 1
• Pages: 218-224

Dates

published

1 - 2 - 2012

online

3 - 12 - 2011

Contributors

author

Marián Varga

• Faculty of Electrical Engineering and Informaton Technology, Slovak University of Technology, Ilkovičova 3, 812 19, Bratislava, Slovak Republic

author

Tibor Ižák

• Institute of Physics AS CR, v.v.i., Cukrovarnicka 10, CZ-16253, Praha 6, Czech Republic

author

Alexander Kromka

• Institute of Physics AS CR, v.v.i., Cukrovarnicka 10, CZ-16253, Praha 6, Czech Republic

author

Marian Veselý

• Faculty of Electrical Engineering and Informaton Technology, Slovak University of Technology, Ilkovičova 3, 812 19, Bratislava, Slovak Republic

author

Karel Hruška

• Institute of Physics AS CR, v.v.i., Cukrovarnicka 10, CZ-16253, Praha 6, Czech Republic

author

Miroslav Michalka

• International Laser Center, Ilkovičova 3, 812 19, Bratislava, Slovak Republic

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Identifiers

DOI

10.2478/s11534-011-0078-4