Comparative study of ZnO layers prepared by PLD from different targets at various oxygen pressure levels

• Authors: Daniel HaÅ¡ko , Jaroslav Bruncko , Andrej Vincze , FrantiÅ¡ek Uherek
• Languages of publication: EN

Abstracts

EN

Two series of polycrystalline zinc oxide (ZnO) layers, from Zn or ZnO targets, were grown on silicon (1 1 1) substrates by pulsed laser deposition (PLD) at ambient oxygen pressure levels, stepwise increased from 1 to 35 Pa. For ablation of targets, a pulsed Nd:YAG laser was used. The structural and morphological properties of the layers were investigated by scanning electron microscopy (SEM), atomic force microscopy (AFM), and secondary ion mass spectrometry (SIMS). The SEM images of ZnO layers in SE mode show a uniform granular structure and modified surface morphology, depending on oxygen pressure. The mean grain size in height and lateral directions decreases with an increase of oxygen pressure from 1 to 5 Pa, while a subsequent rise of oxygen pressure from 5 to 35 Pa will cause an increase in the grain size. The AFM measurement revealed that the surface structures of zinc oxide layers grown from different targets were similar, and the layers formed at an ambient oxygen pressure of 5 Pa exhibited the smallest values of calculated roughness and granularity. SIMS depth profiling analyses confirmed that the ZnO composition was homogenous across the layer, up to the abrupt change of chemical composition at the interface between the ZnO layer and the Si substrate.

Keywords

EN

zinc oxide; pulsed laser deposition; laser ablation; surface characterization

Discipline

• 52.38.Mf: Laser ablation(see also 79.20.Ds, Laser-beam impact phenomena)
• 68.37.Ps: Atomic force microscopy (AFM)
• 81.05.Dz: II-VI semiconductors
• 81.15.Fg: Pulsed laser ablation deposition

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2009
• Volume: 7
• Issue: 2
• Pages: 345-349

Dates

published

1 - 6 - 2009

online

26 - 4 - 2009

Contributors

author

Daniel Haško

• International Laser Centre, Ilkoviaova 3, Bratislava, 841 04, Slovak Republic

author

Jaroslav Bruncko

• International Laser Centre, Ilkoviaova 3, Bratislava, 841 04, Slovak Republic

author

Andrej Vincze

• International Laser Centre, Ilkoviaova 3, Bratislava, 841 04, Slovak Republic

author

František Uherek

• International Laser Centre, Ilkoviaova 3, Bratislava, 841 04, Slovak Republic

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Identifiers

DOI

10.2478/s11534-009-0047-3