Nanostructuring of diamond films using self-assembled nanoparticles

• Authors: Oleg Babchenko , Alexander Kromka , Karel Hruska , Miroslav Michalka , Jiri Potmesil , Milan Vanecek
• Languages of publication: EN

Abstracts

EN

We report the use of gold, nickel and diamond nanoparticles as a masking material for realization of diamond nano-structures by applying the dry plasma etching process. Applying low power plasma (100 W) in a gas mixture of CF4/O2 for 5 minutes results in a formation of three different types of diamond nanostructures, depending on the mask type material and particle size. Using of the Ni mask results in realization of diamond nano-rods, applying of the Au mask brings cauliflower-like structures, and using the diamond powder allows the production of irregular nano-structures. The main advance of the presented etching procedure is use of a self-assembly strategy where no lithographic steps are implemented.

Keywords

EN

diamond nanorods; plasma etching; nanoparticles

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2009
• Volume: 7
• Issue: 2
• Pages: 310-314

Dates

published

1 - 6 - 2009

online

26 - 4 - 2009

Contributors

author

Oleg Babchenko

• Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic

author

Alexander Kromka

• Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic

author

Karel Hruska

• Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic

author

Miroslav Michalka

• International Laser Centre, SK-812 19, Bratislava, Slovak Republic

author

Jiri Potmesil

• Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic

author

Milan Vanecek

• Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic

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Identifiers

DOI

10.2478/s11534-009-0026-8