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Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects

100%

MÃ¼llerovÃ¡ J., VavruÅˆkovÃ¡ V., Å utta P.

Open Physics

2009

vol. 7

issue 2

315-320

We report results obtained from measurements of optical transmittance spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane diluted with hydrogen. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (Âµc-Si:H). Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band gap energy, the B factor of the Tauc plots, E 04 (energy at which the absorption coefficient is equal to 104 cmâˆ’1), and the Urbach energy as a function of the hydrogen dilution. The results were correlated with microstructure, namely volume fractions of the amorphous and crystalline phase with voids, and with the grain size.

Utilizing Hollow-Structured Bamboo as Natural Sound Absorber

88%

Putra A., Khair F. A., Nor M. J. M.

A Rough Estimation of Acoustics of the Cuboidal Room with Impedance Walls

75%

Kocan-Krawczyk A., Brański A.

Archives of Acoustics

2018

vol. 43

issue 2

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2 Archives of Acoustics

1 Open Physics

1 2018

1 2015

1 2009

1 Brański A.

1 Khair F. A.

1 Kocan-Krawczyk A.

1 MÃ¼llerovÃ¡ J.

1 Nor M. J. M.

1 Putra A.

1 VavruÅˆkovÃ¡ V.

1 Å utta P.

Search results

Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects

Utilizing Hollow-Structured Bamboo as Natural Sound Absorber

A Rough Estimation of Acoustics of the Cuboidal Room with Impedance Walls