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The motion of submicron particles involves the deterministic terms resulting from the aerodynamic convection and/or electrostatic attraction, and the stochastic term from the thermal displacement of particles. The Langevin equation describes such behavior. The Brownian dynamics algorithm was used for integration of the Langevin equation for the calculation of the single fiber deposition efficiency. Additionally the deterministic and stochastic of the particle motion were derived, using the Lagrangian and Eulerian approaches of particle movement and balance, for the calculation of the single fiber deposition efficiency due to both mechanisms separately. Combination of the obtained results allows us for calculation of the coupling effect of inertia and interception with the Brownian diffusion in a form of correlation. The results of calculation show that the omitting of the coupling effect of particular mechanism and using the simple additive rule for determination of the single fiber deposition efficiency introduces significant error, especially for particles with diameter below 300 nm.
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