In order to investigate the influence of the number of layers on the properties of ZrO₂ thin films, we prepared one pure ZrO₂ film sample with five layers and Ce, Eu, and Dy-doped ZrO₂ samples with single layer, by spin-coating sol gel-method. The crystal structures of thin films were determined using X-ray diffraction, morphology of the samples was analyzed by scanning electron microscopy, and the optical properties of the samples were determined by ultraviolet/visible absorbance measurements. The results of these measurements have shown that the concentration of the dopants and the thickness of thin film layers play a vital role in the physical, chemical, and optical properties of the pure and doped ZrO₂ thin films.
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