Full-text resources of PSJD and other databases are now available in the new Library of Science.
Visit https://bibliotekanauki.pl
Preferences help
Polish version English version Language
enabled [disable] Abstract
Number of results

Results found: 1

Number of results on page
first rewind previous Page / 1 next fast forward last

Search results

Search:
in the keywords:  62.25.Fg
help Sort By:

help Limit search:
first rewind previous Page / 1 next fast forward last
1
Content available remote

Design, Modeling and Simulation of MEMS Devices on Si, SiC, and Diamond for Harsh Environment Applications

100%
Kociubiński A., Bieniek T., Janczyk G.
|
|
vol. 125
|
issue 6
1374-1376
EN
Set of micromechanical (MEMS) test structures designed for fabrication on silicon, silicon carbide and diamond substrates has been successfully designed. A dedicated mask-set development has been carried along with numerical simulations performed with assistance of a dedicated design and modelling CoventorWare™ - toolset by Coventor. A set of sample simulations presented in this paper has been performed for specific simulation domains focused on silicon-alternative material reality to proof the usefulness of proposed substrates. The aim was to verify its applicability for MEMS design and confirm an outstanding performance of the resulting device which effectively opens a new area of interest for subsequent research and development efforts.
first rewind previous Page / 1 next fast forward last
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.