Novel nanometer scale structures have been produced by thermal heating or laser irradiation on the surface of single- and multi-layers of C_{60} and C_{84} on Si. These structures were examined by combined measurements of scanning tunneling spectroscopy and high resolution electron energy loss spectroscopy. The results show specific chemical reactions of substrate with carbon clusters having single- and double-bonded network. Covalent bonds are formed in some of these chemical reactions.
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