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EN
NdBa_{2}Cu_{3}O_{7-δ} superconducting thin films were grown on SrTiO_{3}(100) and LaSrGaO_{4}(100) substrates by off-axis rf sputtering and pulsed laser deposition. The effects of several deposition parameters, e.g. gas pressure, substrate temperature and energy density were studied. Thin films grown by off-axis rf sputtering were highly c-axis oriented, but those by pulsed laser deposition were predominantly a-axis oriented under our deposition conditions. However, the c-axis oriented portion for the films grown by pulsed laser deposition was increased by increasing the temperature above 800°C. T_{c(zero)} was 87 K and 83 K for the c- and a-axis oriented films respectively. The critical current density of c-axis oriented films was 10^{6}-10^{7} A/cm^{2} below 60 K.
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