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CdS thin films were grown onto glass substrates at the substrate temperature of 573 ± 5 K by ultrasonic spray pyrolysis technique. The electrical and optical properties of the films were characterized before and after thermal annealing by using electrical resistivity measurements and UV/VIS spectrophotometer, respectively. Thermal annealing of CdS films was carried out in air ambient at various annealing temperatures from 473 to 673 K. The variation in electrical conductivity and optical parameters such as transmittance, absorbance and energy band gap of the films with thermal annealing temperature was investigated.
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