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EN
This paper presents the results of research of C-Pd composite films obtained by the physical vapor deposition and chemical vapor deposition method. These films will be applied as hydrogen sensors. It has been examined whether the substrate has an impact on morphology and topologies of the C-Pd composite and whether the thermal conductivity of the substrate has an impact on the average size of the Pd nanoparticles. Substrates such as Al₂O₃, SiO₂, Si, and Mo were used, and in the physical vapor deposition process fullerene (C₆₀) and palladium acetate were deposited. Some of the samples were examined microscopically, while another part was modified in the chemical vapor deposition process in the presence of xylene. It was found that the average size of the Pd nanoparticles prepared in the physical vapor deposition process is independent of the substrate for all of the substrates used in the present experiment. During the chemical vapor deposition process an increase of the size of the Pd nanoparticles was observed - as expected. What is more, we noticed a weak relation between the size of the Pd nanoparticles and the type of substrate on which the C-Pd composite was deposited.
EN
The properties of nanocomposite carbon-nickel-palladium (C-Ni-Pd) films deposited on Al₂O₃ substrate have been investigated and the results are presented in this work. C-Ni-Pd films were obtained by a 3 step process consisting of PVD/CVD/PVD methods. The structure and morphology of the obtained films were characterized by scanning electron microscopy and transmission electron microscopy techniques at various stages of film formation. Energy dispersive X-ray spectrometer was used for measuring the elements segregation in the obtained film. Transmission electron microscopy and scanning transmission electron microscopy observations have shown carbon nanotubes decorated with palladium nanoparticles in the final film. The average size of the palladium nanoparticles did not exceed 10 nm.
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