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EN
This work presents the first results on forming of multi-layered superhard coatings Ti-Hf-Si-N/NbN/Al_2O_3 and their properties as well as structure. Microstructure, elemental and phase compositions of multi-layered coatings obtained by different methods were investigated. There were used such methods as: scanning electron microscopy EDS JEM-7000F microscope (with microanalysis) for research of cross-section of coatings, with subsequent Auger-electron spectroscopy, X-ray diffraction analysis, optical inverted microscope Olympus GX51, electron-ion microscopes Quanta 200 3D and Quanta 600 (scanning electron microscopy), equipped by the detector of X-ray radiation of the system PEGASUS 2000. It was stated that hardness of coatings has reached 56 GPa, and at the same time the factor of wearing during friction was the smallest - 2.571×10^{-5}. It was also noted that nitrogen pressure in the chamber at the deposition of the top layer significantly influences on the properties of samples. For example, the coefficient of friction at P=0.3 Pa from 0.2 at the beginning of track to 0.001 (during the tests), and at the pressure of nitrogen P=0.8 Pa, the coefficient of friction was equal to 0.314 at the beginning of track and 0.384 at the end (during the tests).
EN
Using the two technologies: plasma-detonation and vacuum-arc deposition, we fabricated two types of coatings: Ti-Si-N/WC-Co-Cr/steel and Ti-Si-N/steel. We found that the top coating of Ti-Si-N was nanostructured one with 12 to 15 nm grain sizes and H = 40 to 38 GPa hardness. A thick coating which was deposited using the pulsed plasma jet, demonstrated 11 to 15.3 GPa hardness, an elastic modulus (E) changing within 176 to 240 GPa, and tungsten carbide grain dimensions varying from 150 to 350 nm to several microns. An X-ray diffraction analysis shows that the coating has the following phase composition: TiN, (Ti,Si)N solid solution, WC, W_2C tungsten carbides. An element analysis was performed using energy dispersive spectroscopy (microanalysis) and scanning electron microscopy, as well as the Rutherford backscattering of ^4He^{+} ion and the Auger electron spectroscopy. Surface morphology and structure were analyzed using scanning electron microscopy and scanning tunnel microscopy. Tests friction and resistance (cylinder-plane) demonstrated essential resistance to abrasive wear and corrosion in the solution. The decrease of grain dimensions ≤ 10 nm occurring in the top Ti-Si-N coating layer increased the sample hardness to 42 ± 2.7 GPa under Ti_{72}-Si_8-N_{20} at.% concentration.
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