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Effect of Structure on Physicomechanical Properties of Transition Metals Diboride Films

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Goncharov A., Yunda A., Komsta H., Rogalski P.
Acta Physica Polonica A
|
2017
|
vol. 132
|
issue 2
270-273
EN
Research of the effect of structure on composition and physicomechanical properties of transition metals diboride films deposited by RF-magnetron sputtering was carried out. It was shown that there is a wide range of different structures, from amorphous to nanocrystalline one with 1-40 nm nanocrystallite sizes in the case of transition metals diboride films. The correlation between the structure, composition, and physicomechanical properties of transition metals diboride films was established.
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