We have developed an atmospheric pressure plasma apparatus of remote dielectric barrier discharge (RDBD) applicable for a large area. We have systematically studied the characteristics of medium frequency (MF, 40 kHz) and radio frequency (RF, 13.56 MHz) discharge using an optical emission spectroscope. Nitrogen (N₂) and argon (Ar) gases were used in the MF and RF discharge excitation, respectively, in a mixture with clean dry air (CDA). The peak of oxygen radical (O*₂) appears at 259.3 nm when the RDBD is employed. Furthermore, intensive peaks are observed at gas ratios of N₂:CDA=100:1 in MF excitation and at gas ratios of Ar:CDA=70:0.5 in RF discharge excitation. On the other hand, the contact angle shows about 5° in PET samples after the RDBD treatment using the RF and MF discharge excitation. Surface analyses of polyethylene terephthalate (PET) samples were carried out using an atomic force microscope and X-ray photoelectron spectroscope.
The antireflection structures are fabricated by sol-gel process as a protective layer of solar cells and by hot embossing process with anodized aluminum oxide membrane template on polycarbonate film. The optical properties and morphology of the antireflection structures are analyzed by UV-visible spectroscopy and field emission scanning electron microscopy, respectively. The total conversion efficiency of a polycrystalline Si solar cell module with the protective layer, sol-gel-derived nanoporous antireflection structure, is increased by 2.6% and 5.7% for one-side antireflection coated prismatic matt glass and both-side antireflection coated prismatic matt glass, respectively.
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