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Nanoimaging Using Soft X-Ray and EUV Sources Based on Double Stream Gas Puff Targets

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Wachulak P., Torrisi A., Ayele M., Bartnik A., Węgrzyński Ł., Fok T., Czwartos J., Fiedorowicz H.

Acta Physica Polonica A

2018

vol. 133

issue 2

271-276

In this work we present recent results on nanoscale imaging in the extreme ultraviolet and soft X-ray spectral ranges, describing three novel imaging systems dedicated for high spatial resolution imaging of nanoscale objects with the extreme ultraviolet and soft X-ray radiations. The extreme ultraviolet and soft X-ray full field microscopes operate at 13.8 nm and 2.88 nm wavelengths and are capable of imaging of nanostructures with a sub-50 nm spatial resolution. A soft X-ray contact microscope operates in the "water-window" spectral range from 2.3 to 4.4 nm wavelength, to obtain images of an internal structure of the investigated object in a thin surface layer of soft X-ray light sensitive photoresist. The development of such compact imaging systems may, in the near future, be important from the point of view of new research related to biological, material science, and nanotechnology applications. Such preliminary applications are also shown in the studies of biological samples, including carcinoma cells, diatoms, and neurons.

Contact Microscopy using a Compact Laser Produced Plasma Soft X-Ray Source

81%

Ayele M., Czwartos J., Adjei D., Wachulak P., Ahad I., Bartnik A., Wegrzynski Ł., Szczurek M., Jarocki R., Fiedorowicz H., Lekka M., Pogoda K., Gostek J.

Acta Physica Polonica A

2016

vol. 129

issue 2

237-240

Soft X-ray contact microscopy potentially allows imaging of wet living biological specimens at a spatial resolution higher than optical microscopy and without many of the constraints of scanning electron microscopy. In this paper, we present the development of a laboratory scale contact microscope that uses a laser produced plasma soft X-ray source. The source is based on a double-stream gas-puff target approach and it operates in the "water window" spectral range which enables to capture images of biological samples with a natural contrast. In the preliminary experiments the contact microscope system has been used for imaging of fixed and dried non-malignant HCV29 human bladder cell lines cultured on polymethyl methacrylate photoresists. The samples were exposed with 150 pulses of soft X-rays as an initial test to demonstrate the possibility of image formation. The soft X-ray contact images registered in the photoresists exhibit high resolution in the atomic force microscopy topography which indicates the potential application of soft X-ray contact microscopy in life science to examine small features as small as few tens of nm. The technique could also be used for living cell imaging with further optimization of the microscope system and development of a special specimen holder. The details of the soft X-ray contact microscopy technique and the experimental results are presented and discussed.

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2 Acta Physica Polonica A

1 2018

1 2016

2 Ayele M.

2 Bartnik A.

2 Czwartos J.

2 Fiedorowicz H.

2 Wachulak P.

1 Adjei D.

1 Ahad I.

1 Fok T.

1 Gostek J.

1 Jarocki R.

1 Lekka M.

1 Pogoda K.

1 Szczurek M.

1 Torrisi A.

1 Wegrzynski Ł.

1 Węgrzyński Ł.

Search results

Nanoimaging Using Soft X-Ray and EUV Sources Based on Double Stream Gas Puff Targets

Contact Microscopy using a Compact Laser Produced Plasma Soft X-Ray Source