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  1. 1 Acta Physica Polonica A

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  1. 1 2009

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  1. 1 El Fqih M.

  2. 1 Fournier P.

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Ion Beam Sputtering Monitored by Optical Spectroscopy

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El Fqih M., Fournier P.
Acta Physica Polonica A
|
2009
|
vol. 115
|
issue 5
901-904
EN
Optical spectroscopy gives a simple means to follow the evolution of the surface composition during ion beam sputtering. This is illustrated by three examples: air oxidised metals (Al and Cu), various CuAl alloys and the Cu_{98}Be_2 alloy. Several time scales are distinguished, corresponding to different processes: the elimination of surface contaminants, the removal of the corroded layer. The implications for the use of ion beam optical spectroscopy in surface analysis are discussed.
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