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We study the far infrared electromagnetic response of grating devices by THz time-domain spectroscopy. We first show that THz waves are efficiently injected into silicon waveguides using grating couplers. Moreover, changing the waveguide material parameters by white-light illumination allows us to strongly modify the coupling efficiency. Then we demonstrate resonant effects in segmented grating structures that act as perfect mirrors at selected wavelengths even for focused beams. About 10 periods of the grating participate in the phenomenon, nevertheless the resonance frequency width of the device remains narrow. This collection of experiments shows that millimeter-size mock-ups and THz waves can be effectively used to extrapolate the optical response of micron-size actual devices.
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