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  1. 1 Acta Physica Polonica A

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  1. 1 2015

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  1. 1 Ihm K.

  2. 1 Kim B.

  3. 1 Kim K.

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Surface Property of Indium Tin Oxide (ITO) After Various Methods of Cleaning

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Kim K., Ihm K., Kim B.
Acta Physica Polonica A
|
2015
|
vol. 127
|
issue 4
1176-1179
EN
We investigated the surface property change of indium tin oxide (ITO) with the various cleaning methods, using photoemission spectroscopy (PES), work function change and near-edge X-ray adsorption fine structure (NEXAFS). The detergent treatments of ITO with acetone (C₃H₆O), methanol (CH₄O), 2-propanol (C₃H₈O), and deionized (D) water yielded work function shifts as high as 0.99 eV compared to the no-treatment ITO. In contrast, work function shifts of 0.10-0.35 eV were measured after other treatments. The lowest C 1s concentration was obtained after O2 plasma treatment of ITO. There was no big change in the peak position and the shape of In 3d^{5/2}, and Sn 3d^{5/}2 after each treatment. But C 1s and O 1s spectra shows a peak shift and shape change. Presence of carbon can be minimized by NaOH treatment combined with oxygen plasma. In NEXAFS spectra of C K-edge on each sample, we found two π-binding states whose positions are 284.5 and 287.9 eV, C=C and C=O, respectively.
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