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Layer and Interface Structure of CoFe/Ru Multilayers

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EN
Grazing incidence X-ray scattering measurements have been performed to probe the structure of CoFe/Ru layers and their interfaces. It was found that the interface width increased approximately linearly with the layer number from the substrate in a multilayer and that a substantial asymmetry existed between the width of CoFe/Ru and Ru/CoFe interfaces. By co-minimizing both the specular and diffuse scatter with that simulated from a model structure, the topological roughness amplitude was determined to be comparable to the intermixing interface width.
EN
In recent years magnetic tunnel junctions have been intensively studied and incorporated in magnetic random access memory devices and magnetic sensors, where large tunnelling magnetoresistance ratios are preferred. The largest tunnelling magnetoresistance values until now have been observed in magnetic tunnel junctions with MgO barriers and CoFeB electrodes after annealing of the junction above the recrystallization temperature of the amorphous CoFeB layers. We used X-ray reflectivity and polarized neutron reflectivity to study [Co_ 60 Fe_ 60 B_ 20 /MgO]_ x14 multilayers with the MgO layers prepared by different methods and annealed at different temperatures in order to compare the interface quality and the structural changes induced upon annealing.
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