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SEM Characterization of Multilayer Structures

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Aristov V., Dryomova N., Kireev V., Razgonov I., Yakimov E.
Acta Physica Polonica A
|
1993
|
vol. 83
|
issue 1
81-86
EN
The possibilities of non-destructive multilayer structure characterization using the backscattering electron and modulated cathodoluminescence modes of the SEM have been discussed. It is shown that these techniques allow one to measure the parameters of thin layers of the thickness of about 10 nm.
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