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  1. 1 Acta Physica Polonica A

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  1. 1 2013

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  1. 1 Bai Z.

  2. 1 Li S.

  3. 1 Qin S.

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Study on the Breakdown Mechanism of Fabrication of Micro Channels in Fused Silica Substrates with ps Laser Pulses

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Li S., Bai Z., Qin S.
Acta Physica Polonica A
|
2013
|
vol. 123
|
issue 1
67-72
EN
A new microchannel fabrication technology for fused silica substrate is presented. A mode-locked laser was used to fabricate straight microchannels in a fused silica substrate by laser plasma-induced plasma. The depth of the channels is up to 5 mm and there are no thermal cracks around the channel. We studied the ionization mechanism of optical breakdown formed by laser pulses and discussed the optical breakdown threshold. A mechanism is proposed to explain the formation of the microchannels and the characteristics of the microchannels are analyzed through the laser pulse characteristics.
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