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Epitaxial manganite La_{0.67}Sr_{0.33}MnO₃ (LSMO) layers, with a thickness of 20-50 nm, are prepared on single crystal (001) SrTiO₃ (STO) substrates by pulsed laser deposition technique. Structural characterization (composition analysis, surface morphology), investigated by the Rutherford backscattering spectroscopy and atomic force microscopy, reveals the growth of stoichiometric LSMO films with a smooth surface (root-mean-square value of 0.21-1.6 nm). The prepared LSMO films possess high Curie temperature ( ≈ 412 K), low room temperature resistivity (1-2 mΩ cm) and maximum of temperature coefficient of resistivity TCR = 2.7% K¯¹ at 321 K.
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