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Multilayers of titanium oxide on conductive glasses (silica, covered with indium/tin and tin oxides) were obtained by different methods (from suspension, by sol-gel, by vacuum sputtering). X-ray diffraction and positron annihilation depth-resolved characterization of these samples are presented. The data allow us to determine optimal deposition parameters, in order to obtain the anatase phase, important in practical applications in photoelectrochemical cells.
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