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EN
Influence of interdiffusion, terrace growth, and macroscopic uniformity on X-ray diffraction spectra of [GaAs]_{n}[A1As]_{m} superlattices are presented. High-angle spectra are analysed on the basis of the kinematic theory of diffraction, whereas low-angle spectra are analysed using the dynamic theory. Computer--simulated (using a Monte-Carlo method) spectra based on a "statistical" model of the superlattice structure are applied in the analysis.
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