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Layer and Interface Structure of CoFe/Ru Multilayers

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Pym A., Lamperti A., Cardoso S., Freitas P., Tanner B.
Acta Physica Polonica A
|
2007
|
vol. 112
|
issue 6
1243-1248
EN
Grazing incidence X-ray scattering measurements have been performed to probe the structure of CoFe/Ru layers and their interfaces. It was found that the interface width increased approximately linearly with the layer number from the substrate in a multilayer and that a substantial asymmetry existed between the width of CoFe/Ru and Ru/CoFe interfaces. By co-minimizing both the specular and diffuse scatter with that simulated from a model structure, the topological roughness amplitude was determined to be comparable to the intermixing interface width.
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