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Calculations of Cross Sections Data for Scattering of Electrons on HBr

100%

Radmilović-Radjenović M., Petrović Z.

Acta Physica Polonica A

2010

vol. 117

issue 5

745-747

The R-matrix method provides a complete theoretical framework for the treatment of low energy electron collisions. The method has been implemented into code Quantemol-N (EE) with a goal to provide users in plasma modeling, swarm studies and other applications with an option to calculate the missing data. In this paper we report on cross sections and rate coefficients for hydrogen bromide obtained by using Quantemol-N. The total cross section has been calculated both with and without Born corrections.

On the Role of Radicals in Kinetics of Plasma Etchers in Ar/CF_4 Mixtures

81%

Nikitović Ž., Stojanović V., Petrović Z.

Acta Physica Polonica A

2009

vol. 115

issue 4

765-767

In this paper we present the transport coefficients in Ar/CF_4 mixtures with realistic abundances of CF_x radicals, F atoms, and F_2 molecules that are standard products of plasma chemistry in plasma etching systems and are present in large abundances of the order of few percent in realistic plasma etching devices. It was found that, although radicals make a minimum impact on distribution function and mean energy, the effect on drift velocity is significant and the effect on rates of attachment is large and may change the mode of operation of plasmas.

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2 Acta Physica Polonica A

1 2010

1 2009

2 Petrović Z.

1 Nikitović Ž.

1 Radmilović-Radjenović M.

1 Stojanović V.

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Calculations of Cross Sections Data for Scattering of Electrons on HBr

On the Role of Radicals in Kinetics of Plasma Etchers in Ar/CF_4 Mixtures